项目介绍

2025年3月15日

Coriolis mass flow sensors are based on the measurement of the Coriolis forces acting on a flowing medium inside a vibrating tube. An important advantage of Coriolis mass flow sensors over other types of flow sensors is that they provide a direct measure for the mass flow, independent of fluid parameters like density, viscosity and thermal conductivity. Miniaturization of Coriolis mass flow sensors is difficult because the measured Coriolis forces are extremely small and scale down proportionally with the amount of mass flow. Thanks to microfabrication technologies, a breakthrough was achieved with the invention of an integrated micro Coriolis mass flow sensor based on a silicon nitride tube with a diameter of 80 µm and an extremely thin wall thickness of 1.3 µm, so that the mass of the tube itself is small compared to the mass of the flowing medium. While the performance of the device has been extensively explored for flows of liquids, there are still many open research questions left to improve its performance regarding flows of gases.

In the new project “Micro Coriolis mass flow sensors for gas flows”, new sensor designs and new features of the fabrication process will be explored to improve the zero stability, lower the thermal noise level, and reduce the pressure drop over the sensor. The research concentrates on the design, fabrication and characterization of a complete sensor system that can measure gas flows down to microgram per hour levels. The main challenges are (1) the design and modelling of new sensor topologies based on technologies that have not been explored before, (2) optimization of the MEMS fabrication process, (3) fabrication of the sensor chips in the MESA+ cleanroom and (4) evaluation of the resulting performance improvement in our MEMS measurement lab.

The PhD candidate will work at the Integrated Devices and Systems (IDS) group within the Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) at the University of Twente in Enschede, the Netherlands. You will carry out the research at the University of Twente, with guidance from senior scientists and support from a senior engineer. Various teaching activities in your field of expertise may take up to 20% of your time.

Your profile

• You are highly motivated and an enthusiastic researcher.
• You have a MSc degree in electrical engineering, nanotechnology, applied physics, mechanical engineering or a related topic, with excellent theoretical and experimental skills
• You have shown affinity with microfabrication, electronics, MEMS and/or sensors
• You have good team spirit and like to work in an interdisciplinary and internationally oriented environment.
• You are fluent in English

Our offer

• As a PhD candidate at UT, you will be appointed to a full-time position for four years, with a qualifier in the first year, within a very stimulating and exciting scientific environment;
• The University offers a dynamic ecosystem with enthusiastic colleagues;
• Your salary and associated conditions are in accordance with the collective labour agreement for Dutch universities (CAO-NU);
• You will receive a gross monthly salary ranging from € 2.901,- (first year) to € 3.707,- (fourth year);
• There are excellent benefits including a holiday allowance of 8% of the gross annual salary, an end-of-year bonus of 8.3%, and a solid pension scheme;
• The flexibility to work (partially) from home;
• A minimum of 232 leave hours in case of full-time employment based on a formal workweek of 38 hours. A full-time employment in practice means 40 hours a week, therefore resulting in 96 extra leave hours on an annual basis;
• Free access to sports facilities on campus;
• A family-friendly institution that offers parental leave (both paid and unpaid);
• You will have a training programme as part of the Twente Graduate School where you and your supervisors will determine a plan for a suitable education and supervision;
• We encourage a high degree of responsibility and independence, while collaborating with close colleagues, researchers and other staff.

Information and application

Are you interested in this position? Please send your application via the ‘Apply now’ button below before April 12, 2025, and include the following:

• A cover letter (maximum 2 pages A4), emphasizing your specific interest, qualifications, and motivations to apply for this position.
• A Curriculum Vitae, including a list of all courses attended and grades obtained, and, if applicable, a list of publications and references.

For more information regarding this position, you are welcome to contact dr. ir. R.J. Wiegerink at R.J.Wiegerink@utwente.nl.